Micro ECM (Electrochemical Machining)
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Drilling of Microholes using Electrochemical Machining |
| The drilling of microholes with a diameter smaller than 5 µm by ECM, which had not been reported previously, was attempted using ultrashort voltage
pulses. As a result, a microhole of 4.5 µm entrance diameter and 4 µm exit diameter was successfully drilled in a 5-µm-thick stainless steel sheet. Paper Paper (KIT only) (Precision Engineering, Vol.54, 2018, pp.338-343) |  |  | | Drilled hole | Ultrasmall-diameter tool electrode |
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Electrochemical Machining of Microrods Using a Self-Drilled Hole |
| Using a rod workpiece as the tool electrode, drilling was carried out in a metal sheet by ECM in the first step. The drilled sheet was then used as the tool electrode for fabricating the workpiece into a microrod. As a result, a straight microrod 2.5 µm in diameter was successfully fabricated. Paper Paper (KIT only) (Procedia CIRP, Vol.113, 2022, pp.432-438) |  | | Fabricated microrod |
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