Research Themes
Micro EDM |
Micro Cutting |
Micro Grinding |
Micro USM |
Micro ECM |
Micro Shearing |
Hybrid Micromachining
Micro ECM (Electrochemical Machining)
Drilling of Microholes using Electrochemical Machining
The drilling of microholes with a diameter smaller than 5 µm by ECM, which had not been reported previously, was attempted using ultrashort voltage pulses. As a result, a microhole of 4.5 µm entrance diameter and 4 µm exit diameter was successfully drilled in a 5-µm-thick stainless steel sheet.
Paper Paper (KIT only) (Precision Engineering, Vol.54, 2018, pp.338-343)
Drilled hole
Ultrasmall-diameter tool electrode
Electrochemical Machining of Microrods Using a Self-Drilled Hole
Using a rod workpiece as the tool electrode, drilling was carried out in a metal sheet by ECM in the first step. The drilled sheet was then used as the tool electrode for fabricating the workpiece into a microrod. As a result, a straight microrod 2.5 µm in diameter was successfully fabricated.
Paper Paper (KIT only) (Procedia CIRP, Vol.113, 2022, pp.432-438)
Fabricated microrod